Page 130 - ELT_15th July 2020_Vol 373_Part 2

E40 EXCISE LAW TIMES [ Vol. 373

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note bene ified by 8B301 .g. and designed 8b301.g. and designed to be used
added to be used by lithography by lithography equipment having a
equipment having a light source light source wavelength less than
wavelength less than 245 nm; 245 nm;
Note 8B301.h. does not apply to Note 8B301.h. does not apply to mul-
multi-layer masks with a phase ti-layer masks with a phase shift layer
shift layer designed for the fab- designed for the fabrication of memory
rication of memory devices not devices not specified by 8A301.
specified by 8A301. N.B. For masks and reticles, specially
designed for optical sensors, see
8B602.
28. Change in 8D303 ‘Physics-based’ simula- 8D303 ‘Computational lithogra-
8D303 and tion “software” specially de- phy’ “software” specially designed
old tech- signed for the “development” of for the “development” of patterns
nical note lithographic, etching or deposi- on EUV-lithography masks or reti-
deleted new tion processes for translating cles.
technical masking patterns into specific Technical Note
added topographical patterns in con- ‘Computational lithography’ is the use
ductors, dielectrics or semicon- of computer modelling to predict, cor-
ductor materials. rect, optimise and verify imaging per-
Technical Note formance of the lithography process
‘Physics-based’ in 8D303 means over a range of patterns, processes, and
using computations to determine a system conditions.
sequence of physical cause and effect
events based on physical properties
(e.g., temperature, pressure, diffu-
sion constants and semiconductor
materials properties).
Note
Libraries, design attributes or asso-
ciated data for the design of semi-
conductor devices or integrated
circuits are considered as “technol-
ogy”.
29. Change in 8E302 8E302
note 2 and 3 a. A ‘vector processor unit’ a. A ‘vector processor unit’ de-
and tech- designed to perform more signed to perform more than
nical note is than two calculations on two calculations on ‘floating-
added to floating-point vectors (one- point’ vectors (one-
8E302 dimensional arrays of 32- dimensional arrays of 32-bit
bit or larger numbers) or larger numbers) simulta-
simultaneously; neously;
Technical Note Technical Note
A ‘vector processor unit’ is a A ‘vector processor unit’ is a
processor element with built- processor element with built-in
in instructions that perform instructions that perform multi-
multiple calculations on float- ple calculations on ‘floating-
ing-point vectors point’ vectors (one-dimensional
(one-dimensional arrays of arrays of 32-bit or larger num-
32-bit or larger numbers) bers) simultaneously, having at
EXCISE LAW TIMES  15th July 2020  130